Detailed Product Description

Chemical Filter for Maximum Acids Removal Efficiency and Capacity!

   This panel-type, high-carbon-loading chemical filter is designed for applications in critical manufacturing industries, such as Semiconductors/TFT LCD, for the removal of low level concentrations of Airborne Molecular Contaminants (AMCs) - VOC's, IPA, PGME, PGMEA, NOx, SOx, H2S, DMS, Nitric HMDS, Ozone. They have versatile designs to combat VOCs, and Acids in a combined filter or separate filters.

    As concentrations of VOC's and Acids in the low ppb and ppt range be detrimental to the product quality and production yield in these applications, removal of those harmful gases in cleanrooms and other applications becomes more significant to provide the required level of air quality for products. And, that's what this open-cell foam chemical filter promises to deliver!

    This chemical filter is designed for FFU, MAU, RCU and general applications with >99% initial removal efficiency!!

FEATURES

• Impregnated carbon (CTC 85) for highest first pass removal efficiency

• Higher carbon loading (8kgs) for longer service life
• Unique media for wider range of gases removal (VOC's & Acids)
• Finer activated carbon granules with high BET & Iodine number performance
• Open cell foam based for lower pressure drop
• Easy to retrofit with standard filter hardware
• Total solutions to your AMC removal needs - either to remove acid and base gases, VOCs respectively or concurrently

AVAILABILITY

SIZE: 600x600x50, 1200x600x50, 1200x1200x50 or custom size available!